The International SEMATECH Manufacturing Initiative recently published the results of their Worldwide Fab Energy Study. The research includes benchmark data to help identify the areas to reduce energy use and improve efficiency in semiconductor manufacturing operations. According to the study, there was a big a decrease in normalized fab energy consumption from 1997 to 2011. The ISMI Worldwide Fab Energy Study was conducted at 300 mm and 200 mm semiconductor manufacturing facilities in Asia, North America, and Europe.
ISMI’s recent energy study gives an overview of general industry performance and provides direction for future ISMI energy use reduction activities. Through this and past studies and the continuation of collaborating with industry peers and equipment suppliers long-lasting energy efficiency achievements can be made possible.
Researchers from ISMI’s Environment, Safety and Health (ESH) Center evaluated the annual energy use of each participating fab and determined that energy consumed by process equipment, which according to the latest survey accounts for more than 50% of a facility’s energy usage, has improved its efficiencies by half in 2011 and non-process equipment energy consumption has become one-fourth of the 1997 values. The next highest energy consumers, after process equipment, were central chiller plants and bulk gas production. Waste heat recovery and reuse practices were benchmarked for best in class performance.
Based on the energy survey results, ISMI will focus its efforts to further enable effective energy savings in four identified areas: nitrogen system efficiency and total consumption reduction, Controlled Dry Air (CDA) system efficiency and total consumption reduction, process cooling water system efficiency, and process vacuum system efficiency.
More info: ISMI’s ESH Technology Center