Altatech Launches AltaCVD Chemical Vapor, Atomic Layer Deposition Tool
Altatech Semiconductor, a global provider of advanced processes and manufacturing equipments for the semiconductor industry announced the launch of AltaCVD®, an advanced materials CVD (Chemical vapor deposition) and ALD (Atomic layer deposition) tool. Based on Altatech’s breakthrough vaporizing technology enabling the deposition from new, viscous and non-volatiles precursors, AltaCVD® offers unique new capabilities to R&D facilities and pilot productions lines.
AltaCVD® combines a unique vaporizer technology, chamber design and gas/liquid panel integration. The combination of a proprietary reactor design and precursor introduction path with a pulsed liquid injection and vaporization enables nanoscale control of thickness, uniformity, composition and stoichiometry in complex materials. These depositions are unavailable today with existing techniques.
AltaCVD® is ideally suited for the plasma-enhanced MOCVD and ALD processes of a wide range of materials used in logic and memory devices as well as in microsystems and 3D integration, such as : high-K gate dielectrics, metal electrodes, high-K coupling dielectrics and electrodes in MIM and DRAM capacitors, ferroelectric materials, chalcogenide alloys for PCRAM, seedless and self-forming copper diffusion barriers, copper seed layers, transparent conductive oxides, thin film batteries electrodes and electrolyte.
“The unique design and technology of AltaCVD® is in line with Altatech’s product strategy aiming at accelerating the introduction of next materials generation in the semiconductor chain,” says Hervé Monchoix Altatech Technology Director. “With AltaCVD®, we offer the best-in-class, flexible nanodeposition tool to advanced R&D facilities’ teams.”
To date, multiple beta versions of AltaCVD® systems have already been installed for advanced high-K gate dielectric integration at front-end-of-line R&D facilities and for through-silicon-via (TSV) metallization at a back-end-of-line R&D facility.
Altatech is a global provider of advanced processes and manufacturing equipments for the semiconductor industry and nanotechnologies. The product range includes Nanovision with AltaSight® (Inspection), Nanoprinting with AltaDrop® (Inkjet equipment), Nanodeposition with AltaCVD®. Besides its own tools, Altatech’s reengineering activity offers its customers remanufactured production tools. Altatech was founded in 2003 and is headquartered in Grenoble-Montbonnot with subsidiary office in Germany and distributor in Japan.
If you are familiar with RSS feeds, you can also sign up for our free news feed. Our RSS feed is updated in real-time while our newsletter is updated daily.