Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in process characterization solutions for the semiconductor manufacturing industry, announced the availability of the AXi 940 macro defect inspection module. The new AXi 940 module will perform wafer frontside inspection as part of the all-surface Explorer(tm) Inspection Cluster—a multi-surface inspection system designed to deliver fast, accurate and reliable macro inspection at a low cost-of-ownership. The new module is featured at this week’s semiconductor manufacturing industry trade show, SEMICON® Korea, in Seoul.
The AXi 940 is the culmination of over three years of software development and incorporates the technological advantages of both the AXi and Waferview® product lines. This convergence of technology has resulted in industry-leading macro resolution paired with a completely redesigned software interface focused on reducing cost of ownership through improved productivity and reliability, as well as reduced dependence on human operators.
“Delivering this latest technology to the market has been a high priority for our engineering team this past year,” said Nathan Little, executive vice president and general manager of the Inspection Business Unit. “Commercial activity is in fast-forward, with the first Explorer Inspection Cluster featuring an AXi 940 module at our beta customer, and a second unit is scheduled to ship in April. These initial systems are targeted primarily for high-volume production applications in advanced lithography and CMP processes.”
The AXi 940′s intelligent software significantly reduces the amount of time required for recipe creation by automating many of the tasks and decisions that normally are done by the tool operator. In addition, the all-surface Explorer Inspection Cluster gives users the ability to take the AXi 940 module offline for recipe creation while keeping all other modules in the cluster in production. Previously, if one module had to be worked on, the entire tool would have to be taken off-line.
SEMICON® is a registered trademark of Semiconductor Equipment and Materials International.
About Rudolph Technologies
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry’s growth. Rudolph’s strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization.