SMIC Expands Anchor's NanoScope to 65nm and Beyond

Anchor Semiconductor, the pioneer and technology leader in DFM solutions for controlling layout-to-silicon pattern transfer, and Semiconductor Manufacturing International Corporation (SMIC), the biggest foundry in China, jointly announced the expanded applications and commitment of Anchor’s market-leading NanoScope Platform solutions in SMIC’s advanced manufacturing flows at 65nm node and beyond.

SMIC has been one of the many successful users of Anchor’s NanoScope products and is an early adopter of the updated NanoScope Platform at 130nm and 90nm nodes. The applications at SMIC include NanoScope-PRV(TM), an option for model-based, full chip post-RET/OPC verification, and other OPC and DFM related patterning applications. NanoScope has helped to shorten the time-to-better-yield at SMIC. With its strong business growth at advanced technology nodes, SMIC has doubled its NanoScope licenses for meeting its production needs.

With its unique pattern-centric architecture, NanoScope(TM) platform presents a major technology and industry breakthrough in speed and accuracy, using distributed computing on generic network computers. NanoScope-PRV(TM) leads the industry in simulation-based comprehensive inspection, analysis, and process-limiter pattern extraction. It ensures inspection accuracy with no compromise in performance for critical layer verification before mask making.

“Anchor’s NanoScope products have been in SMIC’s manufacturing flow beginning with process at 130nm then 90nm and now onto 65nm production. Anchor’s software-based solution provides the best combination of accuracy, performance, reliability and ease of use, which allow us to quickly incorporate the tools in our production flow as we ramp up at multiple sites to accommodate increased customer designs. The Anchor team has been always responsive in supporting SMIC with new product features and enhancements,” stated Eric Guo, deputy director of Micro-patterning technology division and mask operation center at SMIC.

Dr. Chenmin Hu, President of Anchor Semiconductor, commented, “We are very pleased to see SMIC’s continued success at using Anchor’s NanoScope Platform to meet its ever increasing requirements for controlling layout-to-silicon patterning at advanced process nodes. Anchor appreciates SMIC’s technology partnership as well as a valued customer”

About SMIC
SMIC (NYSE: SMI; SEHK: 0981.HK) is one of the leading semiconductor foundries in the world and the largest and most advanced foundry in mainland China, providing integrated circuit (IC) manufacturing service at 0.35um to 90 nanometers and finer line technologies. Headquartered in Shanghai, China, SMIC operates three 200mm fabs in Shanghai and one in Tianjin, and one 300mm fab in Beijing, the first of its kind in mainland China. SMIC has customer service and marketing offices in the U.S., Italy, and Japan as well as a representative office in Hong Kong.

About Anchor Semiconductor
Founded in late 2000 and headquartered in Santa Clara, California, Anchor Semiconductor, Inc. is the pioneer and technology leader in semiconductor DFM software products to bridge the gap between design and manufacturing. With its breakthrough pattern-centric architecture, high accuracy process models, fast full-chip simulation and hot-spot inspection, powerful layout pattern analysis, NanoScope(TM) platform is uniquely capable of providing solutions to the patterning challenges in design, RET and OPC, OPC verification, photo mask making and silicon wafer printing.

NanoScope and NanoScope-PRV are trademarks of Anchor Semiconductor, Inc.