Nova Enhances Scatterometry Modeling and Development Tool

Nova Measuring Instruments Ltd. (Nasdaq: NVMI), provider of leading edge stand-alone metrology and the market leader of integrated metrology solutions to the semiconductor process control market, released a new version of its NovaMARS(TM) modeling software tool. The NovaMARS provides an automatic and easy to use solution for advanced structure modeling and application development for the 45nm technology node and beyond. The new version of NovaMARS introduces the concept of Process Oriented Modeling Flexibility (POMF). With POMF, process engineers can harness the power and flexibility of the tool to develop their own scatterometry applications by themselves thus keeping the details of their process within the fab.

NovaMARS was first introduced to the market in July 2006, and has already established 2D and 3D measurement capabilities at various customer sites. The enhanced version of NovaMARS significantly improves application development speed by employing multi CPU high power processing, which makes library creation calculations up to twenty times faster. The high level of automation enables easier and faster application development and eliminates discrepancies between different developers, enabling the best solution, independent of user proficiency.

Commenting on this latest release, Avron Ger, Vice President of the Thin Film Business Unit at Nova said: “Nine months ago we introduced the first version of NovaMARS in response to our customers’ need to have an easy to use, advanced modeling software tool for their scatterometry applications. A good model is the key to good measurement, making the combination of NovaMARS with the NovaScan 3090 and NovaScan 3090Next the best overall metrology solution. Recognizing that ‘if you can’t model it you can’t measure it’, our users have given us extremely positive feedback on NovaMARS, and we are happy to be able to provide yet another significant improvement, strengthening Nova’s leading position in scatterometry applications.”

Gabi Seligsohn, Nova’s President and CEO added: “The addition of high end software solutions to nova’s product portfolio represents a real opportunity for increased revenues and improved profitability and we are already starting to evidence its positive effects.”

NovaMARS is designed to work with the NovaScan(R) 3090 and NovaScan(R) 3090Next Optical CD & shape-profiling scatterometry metrology systems, available as integrated or stand-alone systems. The combination of these hardware and software tools delivers 50% more throughput, 50% greater reliability and superior tool-to-tool matching for advanced technology beyond 45nm technology nodes.

About Nova
Nova Measuring Instruments Ltd. develops, produces and markets advanced integrated and stand alone metrology solutions for the semiconductor manufacturing industry. Nova is traded on the NASDAQ & TASE under the symbol NVMI.